Submitting a New Mask to Microlab
Jared Mehl
April 7, 2004
(Assumes you’ve already created a nice *.cif file by whatever means you choose)
1) Import *.cif file in L-Edit
2) Select everything (drag box around it)
3) “Draw -> Group” (give it a nice name like cell0 or something)
4) “Cell -> Flatten”
5) “Cell -> Fabricate -> cell0” (or whatever you named the whole group)
6) Export as *_temp.cif in cif format
7) Check file in cleview, them re-import in L-Edit
8) Repeat steps 4 and 5
9) “Setup -> Layers”
10) Make up GDS# for your layer (if it doesn’t have one) and write it down
11) Export as *.gds in GDSII format
12) Run Exceed
13) SSH to gold.eecs.Berkeley.edu (or radium if gold is down)
14) Transfer *.gds files to gold (or radium)
15) Run “cadwand”
16) Type “l”, “[space]”, “2” to run conversion script
17) Follow instructions, enter appropriate GDS#, (10x for gcaws, 1x for ksaligner)
18) Check to make sure *.tap file looks OK
19) Write down number of flashes for mask
20) Fill out mask request form on Microlab website
For reference: Emulsion Masks are normal
Chrome Masks are inverted (for liftoff steps)
Iron Oxide are transparent