Submitting a New Mask to Microlab

Jared Mehl

April 7, 2004

 

(Assumes you’ve already created a nice *.cif file by whatever means you choose)

1)      Import *.cif file in L-Edit

2)      Select everything (drag box around it)

3)      “Draw -> Group” (give it a nice name like cell0 or something)

4)      “Cell -> Flatten”

5)      “Cell -> Fabricate -> cell0” (or whatever you named the whole group)

6)      Export as *_temp.cif in cif format

7)      Check file in cleview, them re-import in L-Edit

8)      Repeat steps 4 and 5

9)      “Setup -> Layers”

10)  Make up GDS# for your layer (if it doesn’t have one) and write it down

11)  Export as *.gds in GDSII format

12)  Run Exceed

13)  SSH to gold.eecs.Berkeley.edu (or radium if gold is down)

14)  Transfer *.gds files to gold (or radium)

15)  Run “cadwand”

16)  Type “l”, “[space]”, “2” to run conversion script

17)  Follow instructions, enter appropriate GDS#, (10x for gcaws, 1x for ksaligner)

18)  Check to make sure *.tap file looks OK

19)  Write down number of flashes for mask

20)   Fill out mask request form on Microlab website

 

For reference: Emulsion Masks are normal

                        Chrome Masks are inverted (for liftoff steps)

                        Iron Oxide are transparent